DocumentCode
3373824
Title
ICMTS 2002. Proceedings of the 2002 International Conference on Microelectronic Test Structures (Cat. No.02CH37357)
fYear
2002
fDate
11-11 April 2002
Keywords
integrated circuit testing; MEMS; RF modelling; interconnect; matching; microelectronic test structure; nonvolatile memory; parameter extraction; photonics; process characteristics; reliability; yield;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on
Conference_Location
Cork, Ireland
Print_ISBN
0-7803-7464-9
Type
conf
DOI
10.1109/ICMTS.2002.1193157
Filename
1193157
Link To Document