Title :
Impact of probe configuration and calibration techniques on quality factor determination of on-wafer inductors for GHz applications
Author :
Havens, R.J. ; Tiemeijer, L.F. ; Garnbus, L.
Author_Institution :
Philips Res. Labs., Eindhoven, Netherlands
Abstract :
We demonstrate that the quality factors measured on on-wafer (spiral) inductor test-structures are largely influenced by the choice between ground-signal and ground-signal-ground probe configuration. In particular when the SOLT network analyzer calibration technique is used in combination with ground-signal probing, the quality factor value can be overestimated significantly.
Keywords :
Q-factor measurement; calibration; inductors; network analysers; probes; RF test structure; SOLT network analyzer; calibration technique; ground-signal probe configuration; ground-signal-ground probe configuration; on-wafer spiral inductor; quality factor measurement; BiCMOS integrated circuits; Calibration; Electrical resistance measurement; Impedance; Inductors; Probes; Q factor; Radio frequency; Spirals; Testing;
Conference_Titel :
Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on
Print_ISBN :
0-7803-7464-9
DOI :
10.1109/ICMTS.2002.1193164
