Title :
Strategies and test structures for improving isolation between circuit blocks
Author :
Szmyd, D. ; Gambus, Laurent ; Wilbanks, William
Author_Institution :
Philips Semicond., Hopewell Junction, NY, USA
Abstract :
RF coupling of signals between circuit blocks can be severe. We quantify electrical isolation on concentric test structures using s-parameter measurements up to 50 GHz. The use of deep trenches greatly improves isolation. Guard rings and junction isolation are also beneficial.
Keywords :
S-parameters; isolation technology; 50 GHz; RF signal coupling; S-parameter measurement; circuit block; concentric test structure; deep trench isolation; electrical isolation; guard ring; junction isolation; Capacitance; Circuit testing; Conductivity; Crosstalk; Dielectric substrates; Frequency; Impedance; Integrated circuit noise; Scattering parameters; Semiconductor device noise;
Conference_Titel :
Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on
Print_ISBN :
0-7803-7464-9
DOI :
10.1109/ICMTS.2002.1193177
