Title :
A test structure for the design of thermal flow sensors
Author :
Sabaté, N. ; Gràcia, L. ; Santander, J. ; Cané, C.
Author_Institution :
Centre Nacional de Microelectron., CSIC, Barcelona, Spain
Abstract :
A test structure for the design and optimisation of thermal gas flow sensors has been developed. This test structure provides information about the temperature distribution created around a heating element as well as its modification due to a gas flow, thus permitting to obtain information about the thermal conductivity of the membrane material. Data obtained from the characterisation of the structure can be used in the optimisation of a flow sensor designed for any specific application.
Keywords :
flow measurement; membranes; microsensors; temperature distribution; thermal conductivity; design optimisation; heating element; membrane material; temperature distribution; test structure; thermal conductivity; thermal gas flow sensor; Biomembranes; Design optimization; Fluid flow; Gas detectors; Heating; Materials testing; Sensor phenomena and characterization; Temperature distribution; Thermal conductivity; Thermal sensors;
Conference_Titel :
Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on
Print_ISBN :
0-7803-7464-9
DOI :
10.1109/ICMTS.2002.1193180
