Title :
Fabrication and characterization of silicon nitride nanopore
Author :
Lingzhi Wu ; Hang Liu ; Yuqi Liu ; Hao Chen ; Quanjun Liu ; Zuhong Lu
Author_Institution :
State Key Lab. of Bioelectronics, Southeast Univ., Nanjing, China
Abstract :
Nanopores have become an important tool for molecule detection at single molecular level. In our work, the solid nanopore in silicon nitride membranes are fabricated and characterized by experiments. Firstly, the free-standing silicon nitride membranes are designed and etched by delicate techniques. Then, the free-standing membranes are drilled by focus ion beam. A set of nanopores with varied diameters and shapes are fabricated by different acting time of focused ion beam. These nanopores display the high quality of morphologies and electric signals. In addition of DNA, a series of evident block currents appear corresponding to the translocation of single DNA molecule through the pore. The results will shed light on the engineering of nanopore devices for single-molecule sensing.
Keywords :
DNA; biochemistry; biological techniques; drilling; electrochemical sensors; etching; ion beams; membranes; molecular biophysics; nanofabrication; nanoporous materials; silicon compounds; Si3N4; block currents; electric signals; focused ion beam acting time; free-standing membrane drilling; free-standing silicon nitride membrane design; free-standing silicon nitride membrane etching; molecule detection; morphologies; nanopore device engineering; nanopore diameters; nanopore shapes; pore translocation; silicon nitride nanopore characterization; silicon nitride nanopore fabrication; single DNA molecule translocation; single molecular level; single-molecule sensing; solid nanopore; DNA; Etching; Fabrication; Ion beams; Nanobioscience; Nanoscale devices; Silicon; block currents; focused ion beam; nanopore; silicon nitride;
Conference_Titel :
Biomedical Engineering and Informatics (BMEI), 2013 6th International Conference on
Conference_Location :
Hangzhou
Print_ISBN :
978-1-4799-2760-9
DOI :
10.1109/BMEI.2013.6746964