DocumentCode
3374560
Title
Characterisation of microfluidic devices
Author
Bien, D.C.S. ; Mitchell, S.J.N. ; Gamble, H.S.
Author_Institution
Sch. of Electr. & Electron. Eng., Queen´´s Univ. Belfast, UK
fYear
2002
fDate
8-11 April 2002
Firstpage
211
Lastpage
215
Abstract
Silicon micromachining techniques have enabled the fabrication of a wide range of microfluidic components and systems. Given the small volumes of liquid and low flow rates involved, the accurate characterisation of such systems presents a challenge. To date many of the measurements have been performed manually; this is both time consuming and prone to inaccuracies. This paper describes an automated measurement technique and presents results for a surface micromachined valve.
Keywords
computerised instrumentation; flow measurement; microfluidics; micromachining; microvalves; pressure measurement; silicon; MEMS; Si; Si micromachining techniques; automated measurement technique; computer based system; differential pressure transducer; flow rate; microfluidic devices; polysilicon; surface micromachined valve; Fabrication; Fluid flow; Fluid flow measurement; Microfluidics; Micromachining; Microvalves; Pressure measurement; Silicon; Valves; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on
Print_ISBN
0-7803-7464-9
Type
conf
DOI
10.1109/ICMTS.2002.1193198
Filename
1193198
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