Title :
Triple-junction colour sensor fully compatible with CMOS technology: results of a test chip
Author :
Dalla Betta, G-F. ; Zorzi, N. ; Bellutti, P. ; Boscardin, M. ; Soncini, G.
Author_Institution :
Divisione Microsistemi, ITC-IRST, Povo, Italy
Abstract :
We show that a triple-junction photosensor can been obtained within a CMOS n-well technology with no additional process steps but a simple layout modification of the p-channel-stop mask. Results from the electrooptical characterisation of a specially designed test chip proved that the wavelength selectivity of the sensor can be used for colour detection and confirmed the device full compatibility with CMOS technology.
Keywords :
CMOS integrated circuits; colour; integrated optoelectronics; photodetectors; CMOS compatibility; CMOS n-well technology; colour detection; electrooptical characterisation; layout modification; p-channel-stop mask; sensor wavelength selectivity; test chip; triple-junction colour sensor; triple-junction photosensor; Biomedical optical imaging; Biosensors; CMOS process; CMOS technology; Doping profiles; Optical devices; Optical sensors; Sensor phenomena and characterization; Silicon; Testing;
Conference_Titel :
Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on
Print_ISBN :
0-7803-7464-9
DOI :
10.1109/ICMTS.2002.1193199
