DocumentCode
3374582
Title
Triple-junction colour sensor fully compatible with CMOS technology: results of a test chip
Author
Dalla Betta, G-F. ; Zorzi, N. ; Bellutti, P. ; Boscardin, M. ; Soncini, G.
Author_Institution
Divisione Microsistemi, ITC-IRST, Povo, Italy
fYear
2002
fDate
8-11 April 2002
Firstpage
217
Lastpage
222
Abstract
We show that a triple-junction photosensor can been obtained within a CMOS n-well technology with no additional process steps but a simple layout modification of the p-channel-stop mask. Results from the electrooptical characterisation of a specially designed test chip proved that the wavelength selectivity of the sensor can be used for colour detection and confirmed the device full compatibility with CMOS technology.
Keywords
CMOS integrated circuits; colour; integrated optoelectronics; photodetectors; CMOS compatibility; CMOS n-well technology; colour detection; electrooptical characterisation; layout modification; p-channel-stop mask; sensor wavelength selectivity; test chip; triple-junction colour sensor; triple-junction photosensor; Biomedical optical imaging; Biosensors; CMOS process; CMOS technology; Doping profiles; Optical devices; Optical sensors; Sensor phenomena and characterization; Silicon; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on
Print_ISBN
0-7803-7464-9
Type
conf
DOI
10.1109/ICMTS.2002.1193199
Filename
1193199
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