Fabrication and Packaging of Nanoporous Membrane Chips for Label-Free Ion-Channel Transducer Based Biosensor

This paper relates to a new architecture of label-free Ion channel based biosensors. The biochips are composed of nanoaperture arrays etched in a free-standing silicon nitride (Si₃N₄) supporting membrane. These membranes should be covered lately by a lipid bilayer which hosts bioengineered protein receptors-gated ion channels. This protein complex is used to convert specific binding events with target molecules into an electrical signal. This paper is focusing on the fabrication and packaging of the device.