• DocumentCode
    3374737
  • Title

    Integrated low voltage and low power CMOS circuits for optical sensing of diffraction based micromachined microphone

  • Author

    Qureshi, Muhammad Shakeel ; Basu, Arindam ; Bicen, B. ; Degertekin, L. ; Hasler, Paul

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
  • fYear
    2010
  • fDate
    May 30 2010-June 2 2010
  • Firstpage
    2031
  • Lastpage
    2034
  • Abstract
    We present CMOS electronics for optical sensing of diffraction based micromachined microphone. Peak detector and track and hold circuits are used for continuous time approach with only 58 μA of current for 65dB peak SNR (lPa at 1kHz). We also present a 1-bit sigma delta interface ADC for directly digitizing the signal for digital processing with 63 μA of current for 62dB peak SNR (lPa @ 1kHz). The electronics are designed in 0.35um standard digital CMOS process with reduced supply of 1.5Volts. All the analog front end circuits operate in weak inversion with rail-to-rail wide input linear range.
  • Keywords
    CMOS digital integrated circuits; micromechanical devices; microphones; optical sensors; sigma-delta modulation; CMOS electronic; current 58 muA; current 63 muA; digital CMOS process; integrated low voltage circuit; low power CMOS circuit; micromachined microphone; optical sensing; peak detector; sigma delta interface ADC; size 0.35 mum; voltage 1.5 V; CMOS process; Circuits; Delta-sigma modulation; Detectors; Low voltage; Microphones; Optical diffraction; Optical sensors; Rail to rail inputs; Signal processing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Circuits and Systems (ISCAS), Proceedings of 2010 IEEE International Symposium on
  • Conference_Location
    Paris
  • Print_ISBN
    978-1-4244-5308-5
  • Electronic_ISBN
    978-1-4244-5309-2
  • Type

    conf

  • DOI
    10.1109/ISCAS.2010.5537165
  • Filename
    5537165