Title :
Piezoelectric Harvesters and MEMS Technology: Fabrication, Modeling and Measurements
Author :
Renaud, M. ; Sterken, T. ; Schmitz, A. ; Fiorini, P. ; Van Hoof, C. ; Puers, R.
Author_Institution :
InterUniv. Microelectron. Center, Leuven
Abstract :
Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. The manufactured piezoelectric energy harvesters have been characterized by applying a sinusoidal oscillation as mechanical input and by using a simple resistive load to measure the output power of the system. A maximum output power of 40 muW has been measured for an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. A model aimed at estimating the output power of the fabricated piezoelectric structures has been developed and theoretical estimations have been compared with experimental results.
Keywords :
convertors; electric generators; micromachining; micromechanical devices; piezoelectric devices; vibrations; MEMS technology; fabricated piezoelectric structure; frequency 1.8 kHz; mechanical vibration; micromachining; output power estimation; piezoelectric converter; piezoelectric energy harvester; power 40 muW; resistive load; sinusoidal oscillation; Energy measurement; Fabrication; Manufacturing; Mechanical variables measurement; Micromachining; Micromechanical devices; Power generation; Power measurement; Power system modeling; Vibration measurement; energy harvester; micromachining; piezoelectricity;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300274
