Title :
Selective Gas Sensor System for CO and H2 Distinction at High Temperatures Based on a Langasite Resonator Array
Author :
Richter, D. ; Schneider, T. ; Doerner, S. ; Fritze, H. ; Hauptmann, P.
Author_Institution :
Univ. of Appl. Studies & Res., Wernigerode
Abstract :
A selective in-situ gas sensor system for CO and H2 distinction at high temperatures has been developed based on an array of piezoelectric langasite resonators. Bulk acoustic wave resonators coated with different sensing films are operated in two different measurement modes which increases the selectivity of the gas sensor system. Simultaneously, a compact and rapid impedance analyzer for precise resonant frequency measurement of the strongly damped resonators has been developed and allows the standalone application for the sensor system.
Keywords :
bulk acoustic wave devices; crystal resonators; fluorescence; gas sensors; alangasite resonator array; bulk acoustic wave resonators; gas sensor; impedance analyzer; piezoelectric langasite resonators; resonant frequency measurement; Acoustic measurements; Acoustic waves; Film bulk acoustic resonators; Gas detectors; Hydrogen; Impedance; Piezoelectric films; Resonant frequency; Sensor arrays; Temperature sensors; high temperatures; impedance analyzer; langasite; resonant gas sensor array;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300299
