Four-Cantilever Trace Explosive Sensors with Dual SAMs Functionalized for Specific-Sensing Improvement and Nonspecific-Adsorption Depression

Author

Li, Xinxin ; Zuo, Guomin ; Li, Peng ; Zhang, Zhixiang ; Wang, Yuelin ; Cheng, Zhenxing ; Liu, Min

Author_Institution

Chinese Acad. of Sci., Shanghai

fYear

2007

fDate

10-14 June 2007

Firstpage

999

Lastpage

1002

Abstract

A top-down formed four-cantilever micro-sensor structure is equipped with self-assembled dual monolayers on the surfaces for specific detection to trace explosive and depression of environmental cross-talk. Sensor design of the four-lever scheme, micro-fabrication, surface modification of the dual monolayers and experimental results for ultra-sensitive detection of explosive are sequentially related. The testing results confirm that the sensor can detect TNT at the resolution level of several tens of ppt and can effectively depress the influences from environmental temperature and humidity change.

Keywords

cantilevers; chemical sensors; explosives; microsensors; TNT; dual SAM function; environmental cross-talk; explosive ultra-sensitive detection; four-cantilever micro-sensor structure; four-cantilever trace explosive sensors; micro-fabrication; nonspecific-adsorption depression; self-assembled dual monolayers; surface modification; Actuators; Biosensors; Explosives; Gas detectors; Humidity; Piezoresistance; Solid state circuits; Surface treatment; Temperature sensors; Transducers; Microcantilever; dual-SAM functionalization; self-assembled monolayer; trace vapor sensing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300301

Filename

4300301