Single Carbon Nanotube Pirani Gauge By Local Synthesis

This work presents the synthesis, assembly and integration of a single, suspended multiwalled carbon nanotube (MWCNT) as a Pirani gauge using localized synthesis. By monitoring electrical connection of the CNT, the controlled growth process allows the synthesis of a single CNT within 20 seconds. I-V curves of the CNT show reduced CNT resistance in a vacuum pressure environment compared with the CNT resistance at atmospheric pressure. The results indicate a Pirani effect exhibited by the CNT. In a nitrogen environment, the single CNT Pirani gauge demonstrates pressure sensitivity within absolute pressure range of 10² to 10⁵ Pa.