New TiO2 and Carbon Nanotube Hybrid Microsensors for Detecting Traces of O2 in Beverage Grade CO2

Author

Sotter, E. ; Llobet, E. ; Espinosa, E.H. ; Ionescu, R. ; Vilanova, X. ; Bittencourt, C. ; Felten, A. ; Pireaux, J.-J. ; Correig, X.

Author_Institution

Univ. Rovira i Virgili, Tarragona

fYear

2007

fDate

10-14 June 2007

Firstpage

1039

Lastpage

1042

Abstract

We report on the development, fabrication and testing of an oxygen microsensor conceived for detecting traces of oxygen in beverage grade carbon dioxide. The microsensor is based on a titanium oxide and carbon nanotube hybrid gas sensitive layer obtained by a modified sol-gel process. The hybrid films show a high responsiveness towards traces of oxygen (~ 6) when operated at moderate temperatures (350degC). This sensitivity compares very favourably to the one shown by similar microsensors based on titanium oxide with no carbon nanotubes.

Keywords

carbon compounds; carbon nanotubes; gas sensors; microsensors; oxygen; sol-gel processing; titanium compounds; CO₂; O₂; TiO₂; beverage grade carbon dioxide; carbon nanotube; hybrid films; hybrid microsensors; oxygen microsensor; sol-gel process; temperature 350 C; Annealing; Carbon dioxide; Carbon nanotubes; Fabrication; Gas detectors; Microsensors; Organic materials; Plasma temperature; Temperature sensors; Titanium; Oxygen sensors; carbon nanotubes; hybrid materials; sol gel; titanium oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300311

Filename

4300311