Title :
New TiO2 and Carbon Nanotube Hybrid Microsensors for Detecting Traces of O2 in Beverage Grade CO2
Author :
Sotter, E. ; Llobet, E. ; Espinosa, E.H. ; Ionescu, R. ; Vilanova, X. ; Bittencourt, C. ; Felten, A. ; Pireaux, J.-J. ; Correig, X.
Author_Institution :
Univ. Rovira i Virgili, Tarragona
Abstract :
We report on the development, fabrication and testing of an oxygen microsensor conceived for detecting traces of oxygen in beverage grade carbon dioxide. The microsensor is based on a titanium oxide and carbon nanotube hybrid gas sensitive layer obtained by a modified sol-gel process. The hybrid films show a high responsiveness towards traces of oxygen (~ 6) when operated at moderate temperatures (350degC). This sensitivity compares very favourably to the one shown by similar microsensors based on titanium oxide with no carbon nanotubes.
Keywords :
carbon compounds; carbon nanotubes; gas sensors; microsensors; oxygen; sol-gel processing; titanium compounds; CO2; O2; TiO2; beverage grade carbon dioxide; carbon nanotube; hybrid films; hybrid microsensors; oxygen microsensor; sol-gel process; temperature 350 C; Annealing; Carbon dioxide; Carbon nanotubes; Fabrication; Gas detectors; Microsensors; Organic materials; Plasma temperature; Temperature sensors; Titanium; Oxygen sensors; carbon nanotubes; hybrid materials; sol gel; titanium oxide;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300311
