Title :
Fabrication of an Ion Source using Carbon Nanoparticle Field Emitters for a Micro Time-of-Flight Mass Spectrometer
Author :
Yoon, H.J. ; Song, S.H. ; Cho, J.B. ; Jung, K.W. ; Lee, S. ; Koh, K.H. ; Yang, S.S.
Author_Institution :
Ajou Univ., Suwon
Abstract :
This paper presents the fabrication of an ion source using carbon nanoparticle field emitters for a micro time-of-flight mass spectrometer (TOFMS). The micro TOFMS consists of a glass substrate with several electrodes and a silicon substrate with carbon nanoparticle (CNP) field emitters. The type of CNP field emitters is the triode type with which we can control the emission current at low voltage. The CNP layer is grown by hot-filament chemical-vapor deposition (HFCVD). The size of the assembled device is 10 times10 times 1 mm . The emission current of the ion source can be controlled from 0 to 94.3 muA when the gate voltage varies from 0 to 85 V.
Keywords :
carbon; chemical vapour deposition; electric current control; field emitter arrays; field ion emission; ion sources; micromachining; nanoparticles; spectrometer accessories; time of flight mass spectrometers; triodes; C; carbon nanoparticle field emitters; current 0 muA to 94.3 muA; emission current control; glass substrate; hot-filament chemical-vapor deposition; ion source fabrication; low voltage operations; micro time-of-flight mass spectrometer; microTOFMS; silicon substrate; size 1 mm; size 10 mm; triode type field emitters; voltage 0 V to 85 V; Carbon dioxide; Chemicals; Electrodes; Fabrication; Glass; Ion sources; Low voltage; Mass spectroscopy; Silicon; Voltage control; carbon nanoparticle; field emitter; ion source; mass spectrometer;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300318
