Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System

Author

Takagi, S. ; Sasaki, H. ; Shikida, M. ; Sato, K.

Author_Institution

Nagoya Univ., Nagoya

fYear

2007

fDate

10-14 June 2007

Firstpage

1147

Lastpage

1150

Abstract

We have previously proposed an arrayed vertical motion system based on a tulip-shaped electrostatic clutch for producing haptic displays. The system has an advantage in that it is able to individually operate arrayed end-effecter elements with high-power and large strokes (output: 600 mN and displacement: 60 mum). We added a new electrostatic latch mechanism to the system to individually control the projection state. We used MEMS technologies to fabricate a 4times4 array electrostatic latch mechanism. The total size of the mechanism was 6.0 times 6.0 times 0.5 mm. We evaluated the relationship between the applied voltage and a holding force of a few mN was obtained for the spring device.

Keywords

electrostatic devices; micromechanical devices; MEMS technologies; arrayed end-effecter elements; arrayed vertical motion system; electrostatic force; electrostatic latch mechanism; handling projection; haptic displays; tulip-shaped electrostatic clutch; Control systems; Displays; Electrostatic actuators; Haptic interfaces; Internet; Micromechanical devices; Piezoelectric actuators; Sensor arrays; Shape memory alloys; Springs; arrayed vertical motion system; electrostatic force; latch mechanism;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300338

Filename

4300338