Title :
Frequency Transition Phenomenon of Self-Oscillated Micro-Cantilever by Changing Driving Voltage
Author :
Mita, Makoto ; Ataka, Manabu ; Ishida, Tadashi ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi
Author_Institution :
JAXA, Kanagawa
Abstract :
We have found an interesting phenomenon of self-excited oscillation of electrostatic microcantilever; the device was found to be self-oscillated under an applied dc voltage, by repeating charge and discharge between the fixed and the movable electrodes. Oscillation frequency is changed by changing apply dc voltage. The phenomenon can be used to make a MEMS version of voltage-controlled oscillator (VCO) for constructing a simple voltage-controlled oscillator that is free from external inductors or capacitors.
Keywords :
cantilevers; electrostatic devices; micromechanical devices; oscillations; voltage-controlled oscillators; MEMS; dc voltage; driving voltage; electrode; electrostatic microcantilever; frequency transition phenomenon; oscillation frequency; self-excited oscillation; self-oscillated microcantilever; voltage-controlled oscillator; Capacitors; Contacts; Electrodes; Electrostatics; Frequency; Inductors; Micromechanical devices; Phase locked loops; Voltage control; Voltage-controlled oscillators; ICP-RIE; RF MEMS; VCO; cantilever;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300340
