Title :
Microswitch with Mixed Piezoelectric and Electrostatic Actuation
Author :
Chapuis, F. ; Defay, E. ; Casset, F. ; Manceau, J.F. ; Bastien, F. ; Aïd, M.
Author_Institution :
Inst. Femto, Besancon
Abstract :
In this article, a new concept of microswitch is investigated with the objective to decrease the actuation voltage. It consists in a component with two kinds of actuation mechanisms: piezoelectric actuation and electrostatic actuation. The structures were realized with a technology compatible with CMOS technology. Aluminium nitride (AIN) was selected as piezoelectric material for its maturity and integration capabilities.
Keywords :
CMOS integrated circuits; electrostatic actuators; microswitches; piezoelectric actuators; CMOS technology; aluminium nitride; microswitch; piezoelectric-electrostatic actuation; voltage actuation; Aluminum; CMOS process; CMOS technology; Electrostatic actuators; Energy consumption; Magnetic switching; Microswitches; Piezoelectric materials; Solid state circuits; Voltage; Electrostatic; actuation; microswitch; piezoelectric;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300341
