• DocumentCode
    3376180
  • Title

    Microswitch with Mixed Piezoelectric and Electrostatic Actuation

  • Author

    Chapuis, F. ; Defay, E. ; Casset, F. ; Manceau, J.F. ; Bastien, F. ; Aïd, M.

  • Author_Institution
    Inst. Femto, Besancon
  • fYear
    2007
  • fDate
    10-14 June 2007
  • Firstpage
    1159
  • Lastpage
    1162
  • Abstract
    In this article, a new concept of microswitch is investigated with the objective to decrease the actuation voltage. It consists in a component with two kinds of actuation mechanisms: piezoelectric actuation and electrostatic actuation. The structures were realized with a technology compatible with CMOS technology. Aluminium nitride (AIN) was selected as piezoelectric material for its maturity and integration capabilities.
  • Keywords
    CMOS integrated circuits; electrostatic actuators; microswitches; piezoelectric actuators; CMOS technology; aluminium nitride; microswitch; piezoelectric-electrostatic actuation; voltage actuation; Aluminum; CMOS process; CMOS technology; Electrostatic actuators; Energy consumption; Magnetic switching; Microswitches; Piezoelectric materials; Solid state circuits; Voltage; Electrostatic; actuation; microswitch; piezoelectric;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
  • Conference_Location
    Lyon
  • Print_ISBN
    1-4244-0842-3
  • Electronic_ISBN
    1-4244-0842-3
  • Type

    conf

  • DOI
    10.1109/SENSOR.2007.4300341
  • Filename
    4300341
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3376180