Stability Improvement of Surface Acoustic Wave Motor using Chemically Reduced Lithium Niobate

Author

Shigematsu, Takashi ; Kurosawa, Minoru Kuribayashi

Author_Institution

Tokyo Inst. of Technol., Yokohama

fYear

2007

fDate

10-14 June 2007

Firstpage

1163

Lastpage

1166

Abstract

Stability of friction drive of a surface acoustic wave motor has been improved by adopting chemically reduced lithium niobate. Through experimental and analytical investigations, we clarified the low electric conductivity coupled with pyroelectricity of lithium niobate stator hindered the stable friction drive operation. We indicated that the conductivity improved LN, by chemical reduction, would then prevent the unstable reasons, i.e., the contact electrification and meniscus stiction.

Keywords

pyroelectricity; stability; static electrification; stators; stiction; surface acoustic wave devices; ultrasonic motors; chemically reduced lithium niobate; contact electrification; friction drive operation; meniscus stiction; stability improvement; stator pyroelectricity; surface acoustic wave motor; Acoustic waves; Chemicals; Conductivity; Couplings; Friction; Lithium niobate; Pyroelectricity; Stability; Stators; Surface acoustic waves; Contact Electrification; Friction Drive; Surface Acoustic Wave; Ultrasonic Motor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300342

Filename

4300342