Title :
Stability Improvement of Surface Acoustic Wave Motor using Chemically Reduced Lithium Niobate
Author :
Shigematsu, Takashi ; Kurosawa, Minoru Kuribayashi
Author_Institution :
Tokyo Inst. of Technol., Yokohama
Abstract :
Stability of friction drive of a surface acoustic wave motor has been improved by adopting chemically reduced lithium niobate. Through experimental and analytical investigations, we clarified the low electric conductivity coupled with pyroelectricity of lithium niobate stator hindered the stable friction drive operation. We indicated that the conductivity improved LN, by chemical reduction, would then prevent the unstable reasons, i.e., the contact electrification and meniscus stiction.
Keywords :
pyroelectricity; stability; static electrification; stators; stiction; surface acoustic wave devices; ultrasonic motors; chemically reduced lithium niobate; contact electrification; friction drive operation; meniscus stiction; stability improvement; stator pyroelectricity; surface acoustic wave motor; Acoustic waves; Chemicals; Conductivity; Couplings; Friction; Lithium niobate; Pyroelectricity; Stability; Stators; Surface acoustic waves; Contact Electrification; Friction Drive; Surface Acoustic Wave; Ultrasonic Motor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300342
