Title :
Ultra-Compact, Zero-Power Latching Linear Motor with Integrated Position Sensor for Portable Electronics
Author :
Oh, Chang-Hoon ; Kim, Seong-Hyok ; Choi, Jung-Hoon ; Nam, Hyo-Jjin ; Bu, Jong-Uk
Author_Institution :
LG Electron. Inst. of Technol., Seoul
Abstract :
A large stroke, zero-power latching piezoelectrically actuated linear motor for portable electronics is designed, fabricated, and characterized. The actuator consists of a stator with a micromachined piezoelectric actuator and a metal guide with high permeability, and a permanent magnet rotor as well as an integrated position sensor. The completed actuator has a volume of 1 mm(w) times 3mm(t) times 5mm(l) with driving precision of 5 mum at a scalable full-stroke of 5 mum and a speed of 10 mm/s at 50 kHz of driving frequency. A built-in capacitive position sensor was able to determine the displacement of the rotor with a position sensitivity of 1 fF/mum.
Keywords :
capacitive sensors; linear motors; micromachining; micromotors; piezoelectric actuators; position measurement; built-in capacitive position sensor; frequency 50 kHz; integrated position sensor; permanent magnet rotor; piezoelectric actuator; portable electronics; size 1 mm; size 3 mm; size 5 mm; ultra-compact linear motor; velocity 10 mm/s; zero-power latching linear motor; Capacitive sensors; Frequency; Magnetic sensors; Permanent magnet motors; Permanent magnets; Permeability; Piezoelectric actuators; Rotors; Sensor phenomena and characterization; Stators; Integrated Capacitive Position Sensor; Latching; Linear Motor; Piezoelectric; Zero-Power;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300343
