DocumentCode
3376247
Title
Post-Processing Micromachined Pull-In Accelerometer
Author
Pakula, L.S. ; French, P.J.
Author_Institution
Delft Univ. of Technol., Delft
fYear
2007
fDate
10-14 June 2007
Firstpage
1171
Lastpage
1174
Abstract
This paper reports the first pull-in time accelerometer made by post-processing surface micromachining technology. As the pull-in time is a semi digital signal, the output of the device can be measured with a fully digital circuit. The sensitivity and nonlinearity are comparable with the differential capacitive sensing devices. Aluminium was used for the mechanical layer, while phosphosilicate glass was used as the sacrificial material. Measurements show the change in pull-in time of 5 mus from 0 to 1G.
Keywords
accelerometers; micromachining; digital circuit; postprocessing surface micromachining technology; pull-in accelerometer; time 5 mus; Acceleration; Accelerometers; Damping; Digital circuits; Electrodes; Micromachining; Nonlinear equations; Pulse measurements; Time measurement; Voltage; accelerometer; pull-in; surface micromachining;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300344
Filename
4300344
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