Title :
Anti-Phase Driven Rate Gyroscope with Multi-Degree of Freedom Sense Mode
Author :
Schofield, Adam R. ; Trusov, Alexander A. ; Acar, Cenk ; Shkel, Andrei M.
Author_Institution :
Univ. of California, Irvine
Abstract :
Previously, we reported a 3-DOF (degree of freedom) rate gyroscope design with a 1-DOF drive and 2-DOF sense mode that was shown to be robust to environmental fluctuations. In this work, we introduce a novel design concept that combines the robustness of multi-DOF sensing with the common mode rejection of tuning fork devices in the anti-phase driven 6-DOF gyroscope. Prototypes of the design were fabricated and characterized for both rotational and acceleration inputs. For acceleration loads, the device responded in a common mode resulting in a 75% reduction in amplitude for a differential signal, while for rotations, it responded in anti-phase with sensitivities of 1.687 muV/deg/s and -1.887 muV/deg/s.
Keywords :
gyroscopes; vibrations; antiphase driven rate gyroscope; common mode rejection; multiDOF sensing robustness; tuning fork devices; Acceleration; Automotive engineering; Fluctuations; Frequency; Gyroscopes; Prototypes; Resonance; Robustness; Vehicle dynamics; Vibrations; gyroscope; inertial sensors; robust design; tuning fork;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300351