Geometry optimization of a MEMS-based energy harvesting device

Author

Jagtap, Suyog N. ; Paily, Roy

Author_Institution

Dept. of Electron. & Commun. Eng., Indian Inst. of Technol., Guwahati, India

fYear

2011

fDate

14-16 Jan. 2011

Firstpage

265

Lastpage

269

Abstract

A MEMS based energy harvesting device is designed to convert mechanical vibration energy to electrical energy via piezoelectric effect. In order to improve the performances of the device, the geometry has been optimized by using moving mesh ALE model available in Comsol Multiphysics. The thickness, length and width of metal and ZnO are varied to get maximum displacement and voltage. The length, width and thickness of cantilever are obtained as 2000μm × 120μm × 5.4μm. In order to lower resonance frequency and maximize the output voltage, a proof mass is placed on tip of cantilever. The dimensions of proof mass are 237μm × 120μm × 237μm and mass is 0.145mg. Cantilever beam resonated at a frequency of 630Hz with acceleration of 1g and an output voltage obtained for d₃₁ is 1.06V and for d₃₃ is 3.85V . The proposed device is suitable for vibration energy harvesting and can be used as potential micro-generator.

Keywords

cantilevers; energy harvesting; micromechanical devices; optimisation; piezoelectricity; vibrations; Comsol multiphysics; MEMS based energy harvesting device; cantilever beam; electrical energy; energy conversion; energy harvesting; frequency 630 Hz; geometry optimization; mass 0.145 mg; mechanical vibration energy; piezoelectric effect; voltage 1.06 V; voltage 3.85 V; Acceleration; Damping; Electric potential; Energy harvesting; Face; Vibrations; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Students' Technology Symposium (TechSym), 2011 IEEE

Conference_Location

Kharagpur

Print_ISBN

978-1-4244-8941-1

Type

conf

DOI

10.1109/TECHSYM.2011.5783827

Filename

5783827