DocumentCode :
3376649
Title :
Development of a conductive photoresist with a mixture of SU-8 and HCl doped polyaniline
Author :
Annaiyan, Uma M. ; Kalantar-Zadeh, Kourosh ; Fang, Qiang ; Cosic, Irena
Author_Institution :
Dept. of Comput. Eng., R. Melbourne Inst. of Technol., Melbourne, VIC
fYear :
2005
fDate :
21-24 Nov. 2005
Firstpage :
1
Lastpage :
5
Abstract :
A novel electrically conductive photoresist has been formulated to fabricate microcomponents. The developed conductive photoresist is based upon SU-8 photopolymer, an insulating negative-tone epoxy, in which protonically doped polyaniline (PANI) nanoparticles have been dispersed to enhance the electrical properties. The characteristics of this new conductive photoresist have been studied via electrical measurements. The process for preparing the conductive films from the combination of EB (Emeraldine base) PANI, SU-8 and NMP (N-methyl-2-pyrrolidinone) will be presented. Different weight percentages (wt%) of SU-8 in the above combination have been prepared and spin coated to form thin-films which have been protonated with HCl. The conductivities of the thin- films were measured using a four point probe. The highest conductivity achieved was approximately 1.6 S/cm for the mixture of 10 wt% of SU-8 25 with EB-PANI mixed with NMP. The morphology of the thin-films was studied using a scanning electron microscopy (SEM).
Keywords :
conducting polymers; disperse systems; nanoparticles; photoresists; polymer films; scanning electron microscopy; spin coating; HCl; N-methyl-2-pyrrolidinone; SU-8; conductive photoresist; conductive thin films; dispersed system; emeraldine base polyaniline; microcomponents; negative-tone epoxy; photopolymer; protonically doped polyaniline nanoparticles; scanning electron microscopy; spin coating; Conductive films; Conductivity measurement; Dielectrics and electrical insulation; Electric variables measurement; Morphology; Nanoparticles; Probes; Resists; Scanning electron microscopy; Thin films; Su-8; biosensors; conductive polymer; photoresist; polyaniline; protonation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
TENCON 2005 2005 IEEE Region 10
Conference_Location :
Melbourne, Qld.
Print_ISBN :
0-7803-9311-2
Electronic_ISBN :
0-7803-9312-0
Type :
conf
DOI :
10.1109/TENCON.2005.300927
Filename :
4084910
Link To Document :
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