Title :
Miniature High Sensitivity Ultrasonic Transducers using Epitaxial PZT Thin Films Grown on Epitaxial Γ-AL2O3/SI Substrates for Smart Devices
Author :
Ito, M. ; Takabe, M. ; Otonari, M. ; Akai, D. ; Okada, N. ; Sawada, K. ; Ishida, M.
Author_Institution :
Toyohashi Univ. of Technol., Toyohashi
Abstract :
Miniature high sensitivity ultrasonic transducers have been fabricated using epitaxial lead zirconate titanate, Pb (Zrx, Ti1-x)O3 (PZT), thin films grown on epitaxial SrRuO3/Pt/γ-Al2O3/Si substrates. The 1.3 μm-thick PZT films were prepared by a sol-gel method. The receiving sensitivity of the fabricated transducer was measured at the frequency of 2.5 MHz. The fabricated transducer has good receiving sensitivity.
Keywords :
aluminium compounds; epitaxial layers; lead compounds; ruthenium compounds; silicon; sol-gel processing; strontium compounds; substrates; titanium compounds; ultrasonic transducers; zirconium compounds; PZT-SrRuO3-Al2O3-Si; epitaxial PZT thin films; epitaxial substrates; frequency 2.5 MHz; miniature high sensitivity ultrasonic transducers; size 1.3 μm; smart devices; sol-gel method; Ceramics; Electrodes; Fabrication; Piezoelectric films; Semiconductor thin films; Sonar equipment; Substrates; Transistors; Ultrasonic transducers; Ultrasonic variables measurement; PZT; epitaxial; hydrophone; ultrasonic transducer;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0841-5
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300370
