• DocumentCode
    3376680
  • Title

    Miniature High Sensitivity Ultrasonic Transducers using Epitaxial PZT Thin Films Grown on Epitaxial Γ-AL2O3/SI Substrates for Smart Devices

  • Author

    Ito, M. ; Takabe, M. ; Otonari, M. ; Akai, D. ; Okada, N. ; Sawada, K. ; Ishida, M.

  • Author_Institution
    Toyohashi Univ. of Technol., Toyohashi
  • fYear
    2007
  • fDate
    10-14 June 2007
  • Firstpage
    1275
  • Lastpage
    1278
  • Abstract
    Miniature high sensitivity ultrasonic transducers have been fabricated using epitaxial lead zirconate titanate, Pb (Zrx, Ti1-x)O3 (PZT), thin films grown on epitaxial SrRuO3/Pt/γ-Al2O3/Si substrates. The 1.3 μm-thick PZT films were prepared by a sol-gel method. The receiving sensitivity of the fabricated transducer was measured at the frequency of 2.5 MHz. The fabricated transducer has good receiving sensitivity.
  • Keywords
    aluminium compounds; epitaxial layers; lead compounds; ruthenium compounds; silicon; sol-gel processing; strontium compounds; substrates; titanium compounds; ultrasonic transducers; zirconium compounds; PZT-SrRuO3-Al2O3-Si; epitaxial PZT thin films; epitaxial substrates; frequency 2.5 MHz; miniature high sensitivity ultrasonic transducers; size 1.3 μm; smart devices; sol-gel method; Ceramics; Electrodes; Fabrication; Piezoelectric films; Semiconductor thin films; Sonar equipment; Substrates; Transistors; Ultrasonic transducers; Ultrasonic variables measurement; PZT; epitaxial; hydrophone; ultrasonic transducer;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
  • Conference_Location
    Lyon
  • Print_ISBN
    1-4244-0841-5
  • Electronic_ISBN
    1-4244-0842-3
  • Type

    conf

  • DOI
    10.1109/SENSOR.2007.4300370
  • Filename
    4300370
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3376680