Silicon Cochlear Michrophone "Fishbone" with Complex Filtering and Hilbert Transform Capability for Instantaneous Signal Detection and Analysis

We have been studying on the cochlear mechanism as an efficient structure for sensors and actuators [3], [4], [5], The "Fishbone" has a silicon micromachinable shape derived from the electro-mechanical analogy of the Zwislocki\´s transmission line modelfl], [2], We propose here a novel transduction method being suitable for single- chip and wireless acoustic/vibrometric sensor. It has digitally adjustable complex frequency characteristics, radio- frequency (RF) outputs with direct modulation on resonant beams, and Hilbert transform capability to produce real and imaginary signal pair after quadrature-demodulating the RF output. We show theoretical analysis and experimental results using a newly fabricated Fishbone chip.