Title :
Toward the integration of microsystems supply
Author :
Estibals, Bruno ; Alonso, Corinne ; Salles, Alain ; Cid-pastor, Angel ; Camon, Henri ; Martinez-salamero, Luis
Author_Institution :
Lab. d´´Analyse et d´´Architecture des Systemes, CNRS, Toulouse, France
Abstract :
This work presents a global methodology for the complete design of an integrated inductor. After describing the different existing topologies, a method providing the geometrical dimensions from the desired inductance value is reported. Then, the frequency dependency of the inductance and its parasitic capacitance and resistance are analyzed by means of specific CAD tools. A specific analysis of thermal failure mechanisms is presented next. Temperature and current density of different shapes of connection pad are subsequently studied.
Keywords :
capacitance; circuit CAD; electric resistance; inductance; inductors; micromechanical devices; network topology; temperature; CAD tool; connection pad shapes; current density; frequency dependent analysis; inductance value; integrated inductor design; microsystems supply integration; parasitic capacitance; parasitic resistance; temperature; thermal failure mechanism analysis; Current density; Design automation; Failure analysis; Frequency; Inductance; Inductors; Parasitic capacitance; Shape; Temperature; Topology;
Conference_Titel :
Circuits and Systems, 2004. ISCAS '04. Proceedings of the 2004 International Symposium on
Print_ISBN :
0-7803-8251-X
DOI :
10.1109/ISCAS.2004.1329724
