Title :
Run-to-run control of static systems
Author :
Kosut, Robert L. ; De Roover, Dick ; Emami-Naeini, Abbas ; Ebert, Jon L.
Author_Institution :
SC Solutions Inc., Santa Clara, CA, USA
Abstract :
Run-to-run control using static linear models is examined. Conditions are presented for stability, (statistical) performance, and robustness using the standard control theory. A simulation example shows the usefulness of the method applied to a rapid thermal oxidation process
Keywords :
electronics industry; linear systems; process control; rapid thermal processing; stability; statistical analysis; process control; rapid thermal oxidation process; robustness; run-to-run control; stability; static linear models; statistical performance analysis; Algorithm design and analysis; Control design; Control systems; Error correction; Manufacturing systems; Monitoring; Oxidation; Process control; Robust stability; Sensor phenomena and characterization;
Conference_Titel :
Decision and Control, 1998. Proceedings of the 37th IEEE Conference on
Conference_Location :
Tampa, FL
Print_ISBN :
0-7803-4394-8
DOI :
10.1109/CDC.1998.760765
