• DocumentCode
    337712
  • Title

    Run-to-run control of static systems

  • Author

    Kosut, Robert L. ; De Roover, Dick ; Emami-Naeini, Abbas ; Ebert, Jon L.

  • Author_Institution
    SC Solutions Inc., Santa Clara, CA, USA
  • Volume
    1
  • fYear
    1998
  • fDate
    1998
  • Firstpage
    695
  • Abstract
    Run-to-run control using static linear models is examined. Conditions are presented for stability, (statistical) performance, and robustness using the standard control theory. A simulation example shows the usefulness of the method applied to a rapid thermal oxidation process
  • Keywords
    electronics industry; linear systems; process control; rapid thermal processing; stability; statistical analysis; process control; rapid thermal oxidation process; robustness; run-to-run control; stability; static linear models; statistical performance analysis; Algorithm design and analysis; Control design; Control systems; Error correction; Manufacturing systems; Monitoring; Oxidation; Process control; Robust stability; Sensor phenomena and characterization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Decision and Control, 1998. Proceedings of the 37th IEEE Conference on
  • Conference_Location
    Tampa, FL
  • ISSN
    0191-2216
  • Print_ISBN
    0-7803-4394-8
  • Type

    conf

  • DOI
    10.1109/CDC.1998.760765
  • Filename
    760765
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=337712