Title :
MEMS-Based Air Quality Sensor
Author :
Mescheder, U. ; Bauersfeld, M.-L. ; Kovacs, A. ; Kritwattanakhron, J. ; Müller, B. ; Peter, A. ; Ament, Ch ; Rademacher, S. ; Wöllenstein, J.
Author_Institution :
Hochschule Furtwangen Univ., Furtwangen
Abstract :
This paper presents a novel sensor array based on MEMS-technology for quantitative measurement of the air quality and a novel model based measurement strategy. The sensor array consists of SnO2 - gas sensors, a porous silicon based humidity sensor and a Pt-temperature sensor monolithically integrated on a single chip. It was fabricated using SOI-technology, Pt-metallization and bulk micromachining. Good characteristics of the sensor array in terms of thermal properties, sensitivity, selectivity and time response have been achieved. The values of gas content and atmospheric humidity evaluated based on the developed sensor models are in a good consistence with the actual values.
Keywords :
gas sensors; humidity sensors; micromachining; microsensors; sensor arrays; silicon-on-insulator; temperature sensors; MEMS-based air quality sensor; SOI-technology; bulk micromachining; gas sensors; humidity sensor; sensor array; temperature sensor; Atmospheric modeling; Gas detectors; Humidity; Micromachining; Semiconductor device measurement; Sensor arrays; Sensor phenomena and characterization; Silicon; Thermal sensors; Time factors; Air quality measurement; metal oxide gas sensor; porous silicon based humidity sensor; sensor modeling;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300409
