MEMS Tunable Dual-Wavelength Laser with Large Tuning Range

This paper presents a MEMS tunable dual-wave length laser, which simultaneously achieves wide tuning range and two-longitudinal-mode emission. The construction of this laser is based on Littman external cavity configuration. The key point is to use two micro-mirrors to select two different wavelengths at their independent diffraction modes, and the emission of both wavelengths will be collected through the 0^th order of the grating. Meanwhile, wavelength tuning is achieved by rotating one of the mirrors. As a result, a tunable spectral separation of dual-wave length output is obtained. The MEMS device is fabricated by DRIE on SOI wafer, with the size of 3 mm times 3 mm.