DocumentCode
3377522
Title
3-Axes Tactile Sensor with Tunable Sensing Range
Author
Wen, Chih-Chieh ; Lin, Chia-Min ; Fang, Weileun
Author_Institution
Nat. Tsing Hua Univ., Hsinchu
fYear
2007
fDate
10-14 June 2007
Firstpage
1457
Lastpage
1460
Abstract
This study has successfully demonstrated a novel 3-axes polymer tactile sensor with built-in piezoresistive sensors. The sensor consists of polymer membrane and four sensing cantilevers with piezoresistors on both top and side walls to measure the in-plane and out-of-plane loads. The fabrication process allows the changing of polymer membrane material easily. As a result, the sensing range of the present 3 D tactile sensor is easily tuned by varying the polymer material.
Keywords
microsensors; piezoresistive devices; polymers; resistors; tactile sensors; 3-axes tactile sensor; MEMS; piezoresistive sensors; piezoresistors; polymer material; polymer membrane; polymer sensor; sensing cantilevers; tunable sensing range; Biomembranes; Chemical sensors; Doping; Force sensors; Micromechanical devices; Piezoresistance; Piezoresistive devices; Polymers; Sensor phenomena and characterization; Tactile sensors; Piezoresistor; Side-wall doping; Tactile sensor; Tunable membrane;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300419
Filename
4300419
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