Title :
A Micropump-Driven High-Speed MEMS Gas Chromatography System
Author :
Kim, Hanseup ; Steinecker, William H. ; Reidy, Shaelah ; Lambertus, Gordon R. ; Astle, Aaron A. ; Najafi, Khalil ; Zellers, Edward T. ; Bernal, Luis P. ; Washabaugh, Peter D. ; Wise, Kensall D.
Author_Institution :
Univ. of Michigan, Ann Arbor
Abstract :
We report (1) the integration of the first functioning MEMS gas chromatography system ( muGC) featuring a micropump, a micro-column, and a micro-chemiresistor sensor array; and (2) experimental demonstration of the state-of-the-art multi-vapor gas separation and detection. In particular, we report the best GC analysis data from the first micropump-driven muGC system to date: the separation and detection of 11 volatile organic compounds (VOC)´s within only 78 seconds while consuming only 15.1 mW of power within a small volume of 0.5 cc. We also report the use of temperature programming (TP) of the separation column for fast analysis, which shortened the analysis time from 78 seconds to 24 seconds while maintaining gas analysis resolution.
Keywords :
chromatography; gas sensors; micropumps; organic compounds; sensor arrays; MEMS gas chromatography; gas analysis; gas detection; microchemiresistor sensor array; microcolumn; micropump; multivapor gas separation; volatile organic compounds; Chemical sensors; Electrostatic actuators; Gas chromatography; Gas detectors; Micromechanical devices; Micropumps; Monitoring; Sensor arrays; Sensor systems; Temperature sensors; Micro gas chromatography (¿GC); VOC separation and detection; micro chemiresistor sensor; micro column; micropump; micropump-driven ¿GC; temperature programming;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300430
