A Micropump-Driven High-Speed MEMS Gas Chromatography System

Author

Kim, Hanseup ; Steinecker, William H. ; Reidy, Shaelah ; Lambertus, Gordon R. ; Astle, Aaron A. ; Najafi, Khalil ; Zellers, Edward T. ; Bernal, Luis P. ; Washabaugh, Peter D. ; Wise, Kensall D.

Author_Institution

Univ. of Michigan, Ann Arbor

fYear

2007

fDate

10-14 June 2007

Firstpage

1505

Lastpage

1508

Abstract

We report (1) the integration of the first functioning MEMS gas chromatography system ( muGC) featuring a micropump, a micro-column, and a micro-chemiresistor sensor array; and (2) experimental demonstration of the state-of-the-art multi-vapor gas separation and detection. In particular, we report the best GC analysis data from the first micropump-driven muGC system to date: the separation and detection of 11 volatile organic compounds (VOC)´s within only 78 seconds while consuming only 15.1 mW of power within a small volume of 0.5 cc. We also report the use of temperature programming (TP) of the separation column for fast analysis, which shortened the analysis time from 78 seconds to 24 seconds while maintaining gas analysis resolution.

Keywords

chromatography; gas sensors; micropumps; organic compounds; sensor arrays; MEMS gas chromatography; gas analysis; gas detection; microchemiresistor sensor array; microcolumn; micropump; multivapor gas separation; volatile organic compounds; Chemical sensors; Electrostatic actuators; Gas chromatography; Gas detectors; Micromechanical devices; Micropumps; Monitoring; Sensor arrays; Sensor systems; Temperature sensors; Micro gas chromatography (Â¿GC); VOC separation and detection; micro chemiresistor sensor; micro column; micropump; micropump-driven Â¿GC; temperature programming;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300430

Filename

4300430