A Novel Tilting Micromirror with a Triangular Waveform Resonance Response and an Adjustable Resonance Frequency for Raster Scanning Applications

Author

Elata, D. ; Leus, V. ; Hirshberg, A. ; Salomon, O. ; Naftali, M.

Author_Institution

Fac. of Mech. Eng., Technion-Israel Inst. of Technol., Haifa

fYear

2007

fDate

10-14 June 2007

Firstpage

1509

Lastpage

1512

Abstract

We present a novel tilting micro-mirror that has a triangular waveform resonance response, and a resonance frequency that can be continuously and reversibly adjusted. The triangular waveform and the adjustability of the resonance frequency are crucially important for raster-scanning applications. Although the mirror is driven by electrostatic forces, the triangular waveform is achieved by mechanical means. Our micro-mirror is driven by up to 60 Volts whereas to achieve the same waveform without the novel mechanical design would require extremely high voltages.

Keywords

electrostatic actuators; micromirrors; adjustable resonance frequency; electrostatic actuation; electrostatic forces; raster scanning applications; tilting micromirror; triangular waveform resonance response; Displays; Electrostatic actuators; Micromirrors; Mirrors; Pixel; Q factor; Resonance; Resonant frequency; Strips; Voltage; Micromirrors; electrostatic actuation; raster scanning;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0841-5

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300431

Filename

4300431