High Reflectivity Broadband Photonic Crystal Mirror MEMS Scanner

In this paper we introduce a MEMS scanner with a highly reflective broadband photonic crystal mirror. These mirrors achieve higher reflectivity than metal reflectors and can tolerate higher processing temperatures. Photonic crystal mirrors can be made of a single dielectric material and hence are much simpler to fabricate than multi-layer dielectric stacks. Our photonic crystal mirror shows broadband high reflectivity in the wavelength spectrum from 1300 nm to 1500 nm. The single-axis MEMS scanner is fabricated on a SOI wafer and actuated by electrostatic combdrives on resonance. Dynamic deflection measurements show that the scanner achieves 20deg total scan angle with an input square wave of 40 V and up to 120deg total scan angle with 190 V at a resonance frequency of 2.03 kHz.