DocumentCode
3377792
Title
A Thermo-Pneumatically Actuated Tip-Tilt-Piston Mirror
Author
Werber, Armin ; Zappe, Hans
Author_Institution
Univ. of Freiburg, Freiburg
fYear
2007
fDate
10-14 June 2007
Firstpage
1525
Lastpage
1528
Abstract
We present a novel, high stroke tip-tilt-piston micro-mirror actuated by thermo-pneumatic forces. A circular silicon mirror plate is mounted on top of three balloons, made of a 50 mum thick elastomer membrane. The balloons are inflated under thermo-pneumatic pressure, thus driving the mirror plate into tip-tilt and piston motion. Very large stroke values of 385 mum as well as tip-tilt angles of 5deg were measured. The triangular arrangement of the balloon actuator yields a high flexibility in mirror motion, including tip-tilt in any direction.
Keywords
elastomers; pneumatic actuators; balloon actuator; elastomer membrane; piston motion; thermopneumatic forces; thermopneumatically actuated tip-tilt-piston mirror; triangular arrangement; Actuators; Biomembranes; Fabrication; Mirrors; Pistons; Platinum; Silicon; Solid state circuits; Substrates; Transducers; Actuator; Micro-optics; Polydimethylsiloxane; Thermo-pneumatics;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300435
Filename
4300435
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