DocumentCode
3377968
Title
Nanoscale Straining of Individual Carbon Nanotubes by Micromachined Transducers
Author
Jungen, A. ; Durrer, L. ; Stampfer, C. ; Hierold, C.
Author_Institution
ETH Zurich, Zurich
fYear
2007
fDate
10-14 June 2007
Firstpage
1561
Lastpage
1564
Abstract
We report on the (opto-)mechanical properties of integrated single-walled carbon nanotubes. Individual nanotubes were integrated into micro-actuators by a simple location-controlled integration process. These structures allowed for reproducible strain-dependent Raman analysis of individual nanotubes under various levels of tensile strain. The nanotubes were suspended in air, reducing the support interaction and enabling characterization based on transmission beams.
Keywords
carbon nanotubes; microactuators; micromachining; nanotechnology; location-controlled integration process; microactuator; micromachined transducer; nanoscale straining; single-walled carbon nanotube; strain-dependent Raman analysis; Actuators; Capacitive sensors; Carbon nanotubes; Microactuators; Phonons; Raman scattering; Solid state circuits; Spectroscopy; Transducers; Uniaxial strain; NEMS; carbon nanotubes; process integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300444
Filename
4300444
Link To Document