The comparison of AZO and AZOY films on transmission and conductivity

This paper presents two purposes: 1) the effect of the sputtering power density on AZO and AZOY films by using pulse DC magnetron sputtering technology; 2) the comparison of the differences between AZO and AZOY films optical and electrical properties under different power density. The AZO and AZOY films´ resistivity decrease with the increasing of power density; both of them reach 560 μΩcm while the power density is 2.26 W/cm². The transmission of AZO and AZOY films reduces as the extending of power density. Yet, AZO films become more sensitive. When power density increases from 0.42 to 2.26 W/cm², transmission is significantly reduced from 88% to 74%. However, AZOY films show opposite reaction toward power density. While power density increases from 0.42 to 2.26 W/cm², the transmission still keeps at 90%. Therefore, we can expect that AZOY films in this study are suitable for the application of transparent and conductive abilities.