DocumentCode
3378075
Title
FEM/BEM simulation and experimental study of LLSAW resonator characteristics on YZ-LiNbO3
Author
Makkonen, Tapani ; Plessky, Victor P. ; Grigorievski, Valeri I. ; Kopp, Laurent ; Solal, Marc ; Steichen, William ; Salomaa, Martti M.
Author_Institution
Mater. Phys. Lab., Helsinki Univ. of Technol., Espoo, Finland
Volume
1
fYear
2002
fDate
8-11 Oct. 2002
Firstpage
317
Abstract
The high velocity (above 6000 m/s in LiNbO3) of the longitudinal leaky SAW (LLSAW) mode makes it attractive for use in high frequency SAW devices in the 2-3 GHz range. We have investigated, both experimentally and theoretically, the dependence of one-port LLSAW resonator performance on YZ-LiNbO3 on the metallization thickness and metallization ratio. The results indicate a strong dependence of the Q factor and resonance frequency on the aluminum thickness. The observed behaviour is addressed with the help of simulations using a combined FEM-Green´s function method. Based on the simulated and experimental data, the optimal aluminum thickness is found to be approximately 8%.
Keywords
Green´s function methods; boundary-elements methods; finite element analysis; lithium compounds; metallisation; surface acoustic wave resonators; 2 to 3 GHz; LiNbO3; Q factor; aluminum thickness; combined FEM-Green´s function method; high frequency SAW devices; longitudinal leaky SAW resonator; metallization ratio; metallization thickness; resonance frequency; Corrugated surfaces; Metallization; Optical resonators; Optical surface waves; Periodic structures; Propagation losses; Resonance; Resonant frequency; Surface acoustic waves; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-7582-3
Type
conf
DOI
10.1109/ULTSYM.2002.1193410
Filename
1193410
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