Title :
FEM/BEM simulation and experimental study of LLSAW resonator characteristics on YZ-LiNbO3
Author :
Makkonen, Tapani ; Plessky, Victor P. ; Grigorievski, Valeri I. ; Kopp, Laurent ; Solal, Marc ; Steichen, William ; Salomaa, Martti M.
Author_Institution :
Mater. Phys. Lab., Helsinki Univ. of Technol., Espoo, Finland
Abstract :
The high velocity (above 6000 m/s in LiNbO3) of the longitudinal leaky SAW (LLSAW) mode makes it attractive for use in high frequency SAW devices in the 2-3 GHz range. We have investigated, both experimentally and theoretically, the dependence of one-port LLSAW resonator performance on YZ-LiNbO3 on the metallization thickness and metallization ratio. The results indicate a strong dependence of the Q factor and resonance frequency on the aluminum thickness. The observed behaviour is addressed with the help of simulations using a combined FEM-Green´s function method. Based on the simulated and experimental data, the optimal aluminum thickness is found to be approximately 8%.
Keywords :
Green´s function methods; boundary-elements methods; finite element analysis; lithium compounds; metallisation; surface acoustic wave resonators; 2 to 3 GHz; LiNbO3; Q factor; aluminum thickness; combined FEM-Green´s function method; high frequency SAW devices; longitudinal leaky SAW resonator; metallization ratio; metallization thickness; resonance frequency; Corrugated surfaces; Metallization; Optical resonators; Optical surface waves; Periodic structures; Propagation losses; Resonance; Resonant frequency; Surface acoustic waves; Transducers;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1193410
