Micro Proximity Electron Source with Apertured Electron Window for Nanolithography in Atmosphere

A miniature electron source with small electron windows for use in atmospheric environment has been developed. Electron windows made of 50-nm thick silicon with sizes of 250 nm diameter and 1.5 mum square are fabricated at the bottom of an aperture. Electrons from carbon nanocoils as emitters can be emitted by field emission and transmitted into atmospheric pressure via submicron electron window. The transmittance via the electron window and current density are evaluated to be 4% and 90 pA/mum² , respectively. At the acceleration voltage of 10 kV, electrons penetrated the electron window, ant its pattern was transferred on resist.