Title :
Measuring the electric and magnetic near fields in VLSI devices
Author :
Slattery, Kevin ; Cui, Wei
Author_Institution :
MIS Int., Madison, AL, USA
Abstract :
This paper describes a technique for measurement of high frequency current distributions in microprocessors and other VLSI devices. The technique uses optical precision stepper motors for highly accurate placement of electric and magnetic field probes. Spatial resolution across a device is on the order of 100-200 micrometers. Typical scans accumulate 10000 data points across a scan area of approximately 35 mm 2. Characterizing a device involves a repeated series of spatial scans at harmonics of the fundamental clock frequency
Keywords :
VLSI; application specific integrated circuits; current distribution; electric field measurement; electromagnetic compatibility; integrated circuit testing; magnetic field measurement; microprocessor chips; ASIC; EMC; VLSI devices; electric field probes; electric near field measurement; fundamental clock frequency; harmonics; high frequency current distributions; highly accurate placement; magnetic field probes; magnetic near field measurement; microprocessors; optical precision stepper motors; spatial resolution; spatial scans; Current distribution; Current measurement; Electric variables measurement; Frequency measurement; Magnetic devices; Magnetic field measurement; Microprocessors; Probes; Spatial resolution; Very large scale integration;
Conference_Titel :
Electromagnetic Compatibility, 1999 IEEE International Symposium on
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-5057-X
DOI :
10.1109/ISEMC.1999.810172
