• DocumentCode
    3378594
  • Title

    Methodology to best extend AMHS for site expansion

  • Author

    Gaxiola, Gabriel ; Christensen, Eric ; Hammel, C. ; Stachura, P.

  • Author_Institution
    Manuf. Technol., GLOBAFOUNDRIES U.S. Inc., Malta, NY, USA
  • fYear
    2012
  • fDate
    9-12 Dec. 2012
  • Firstpage
    1
  • Lastpage
    10
  • Abstract
    As companies grow their capacity in multiple buildings there are increasing challenges with the automated material handling systems (AMHS) used to transport the wafers between two or more facilities. In some cases, the links used to perform these transports can become a constraint for the entire system. The problem grows more difficult as the expansion plan extends further into the future, making it harder to predict throughput requirements. This study discusses a particular throughput prediction tool as well as different approaches for evaluating designs. The approaches discussed include: integrated vehicle/conveyor model using static tool (Network approach), segregated dynamic models for conveyor/vehicle system, and integrated vehicle/conveyor dynamic model. The pros/cons of these approaches are discussed based on different use cases. The paper finishes by discussing the strategic advantages of factories performing expansion analysis early in the design of the factory and the importance to continue validating and improving these methods.
  • Keywords
    buildings (structures); conveyors; vehicle dynamics; AMHS; automated material handling system; buildings; expansion plan; integrated vehicle-conveyor dynamic model; segregated dynamic model; site expansion; static tool; throughput prediction tool; wafer transportation; Buildings; Integrated circuit modeling; Predictive models; Semiconductor device modeling; Throughput; Vehicle dynamics; Vehicles;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Simulation Conference (WSC), Proceedings of the 2012 Winter
  • Conference_Location
    Berlin
  • ISSN
    0891-7736
  • Print_ISBN
    978-1-4673-4779-2
  • Electronic_ISBN
    0891-7736
  • Type

    conf

  • DOI
    10.1109/WSC.2012.6465317
  • Filename
    6465317