Title :
Thermal Characterization of a Microfluidic Cell using the 3ω Method
Author :
Barilero, T. ; Chapuis, P.-O. ; Pujade, D. ; Guilet, S. ; Croquette, V. ; Jullien, L. ; Volz, S. ; Gosse, C.
Author_Institution :
Ecole Normale Super., Paris
Abstract :
Resistive heaters, 36 μm to 2 mm side, were microfabricated in indium-tin-oxide (ITO) using ion beam etching (IBE). A microfluidic cell was subsequently assembled and its thermal behavior was studied by the 3ω method. Experiments and finite element model (FEM) simulations both satisfactorily agreed with a simple one-dimensional model for heat diffusion.
Keywords :
etching; finite element analysis; ion beam effects; microfluidics; 3ω method; finite element model; indium-tin-oxide; ion beam etching; microfabrication; microfluidic cell; Etching; Heating; Identity-based encryption; Indium tin oxide; Ion beams; Microfluidics; Plasma temperature; Resists; Temperature measurement; Temperature sensors; plasma etching; temperature measurements;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0841-5
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300516
