EIS-Capacitor-Based LC Wireless Chemical Sensors

Author

Garcia-Canton, J. ; Moreno, L. ; Jimenez, C. ; Merlos, A. ; Baldi, A.

Author_Institution

Centro Naconal de Microelectron. (CNM-IMB, Bellaterra

fYear

2007

fDate

10-14 June 2007

Firstpage

1903

Lastpage

1906

Abstract

The development of new wireless sensors for the measurement of different chemical parameters is reported. A high quality factor EIS (Electrolyte-Insulator-Silicon) capacitor is used as an electrochemical potential-to-capacitance transductor to obtain a LC wireless pH sensor. Measurement of conductivity with the same sensor has been also achieved by exciting it at a different frequency. Detection of other ions than [H+] by deposition of ion selective membranes is demonstrated as well.

Keywords

chemical sensors; electrical conductivity measurement; electrolytes; electrolytic capacitors; EIS-capacitor; LC wireless chemical sensors; conductivity measurement; electrochemical potential-to-capacitance transductor; electrolyte-insulator-silicon capacitor; pH sensor; Capacitance; Capacitive sensors; Capacitors; Chemical sensors; Conductivity measurement; Frequency measurement; Impedance; Magnetic sensors; Resonant frequency; Wireless sensor networks; EIS capacitor; LC sensor; conductivity sensor; ion sensor; pH sensor; wireless sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300530

Filename

4300530