10 GHz range extremely low-loss ladder type surface acoustic wave filter

Author

Odagawa, Hiroyuki ; Yamanouchi, Kazuhiko

Author_Institution

Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan

Volume

1

fYear

1998

fDate

1998

Firstpage

103

Abstract

Here we investigate a 10 GHz range low-loss SAW filter using a ladder type structure. It is fabricated on 128° Y-X LiNbO₃ using direct writing electron beam (EB) lithography techniques and lift-off process. Sub-0.1 μm Al electrodes with the width of 95 nm and thickness of 30 nm are fabricated successfully. Experimental results show extremely low loss characteristics. The minimum insertion loss of 3.4 dB in 10 GHz range and much reduction of the electromagnetic feed through of more than 25 dB range are obtained. They show the potential of SAW devices for 10 GHz range communication systems

Keywords

electron beam lithography; equivalent circuits; frequency response; ladder filters; lithium compounds; losses; microwave filters; surface acoustic wave resonator filters; 0.1 micron; 10 GHz; 128 degree Y-X LiNbO₃; 3.4 dB; 30 nm; 95 nm; Al; Al electrodes; LiNbO₃; direct writing EB lithography; electron beam lithography; extremely low-loss characteristics; insertion loss; ladder type SAW filter; lift-off process; surface acoustic wave filter; Acoustic waves; Electrodes; Electron beams; Feeds; Insertion loss; Lithography; SAW filters; Surface acoustic wave devices; Surface acoustic waves; Writing;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE

Conference_Location

Sendai

ISSN

1051-0117

Print_ISBN

0-7803-4095-7

Type

conf

DOI

10.1109/ULTSYM.1998.762108

Filename

762108