Phase velocity measurement of in-plane polarized surface acoustic waves with high spatial resolution

In this paper we present a new method that allows the measurement of the phase velocity of in-plane polarized SAWs with high spatial resolution. The capabilities of the scanning acoustic force microscope had to be extended by the analysis of torsional cantilever motion. A nonlinear coupling mechanism between in-plane oscillations and this movement could be found, that allows an mechanical mixing of in-plane SAWs. Phase velocity measurements of Love waves on the system Au/SiO₂/ST-quartz are presented. A good agreement with theoretical predictions for the velocities could be found