Title :
New results on surface transverse wave resonators built with different combinations of groove and strip gratings
Author :
Ballandras, S. ; Bigler, E. ; Daniau, W. ; Py, J. ; Pakfar, A. ; Marianneau, G. ; Martin, G.
Author_Institution :
Univ. de Franche-Comte, Besancon, France
Abstract :
Combined strip and groove grating have been studied for the fabrication of Surface Transverse Wave (STW) resonators. Recessed and protruding metal strip structure have been tested and used to build 200 and 500 MHz devices. Their main characteristics have been systematically measured to determine their evolution versus geometries of the gratings. Finally, the temperature sensitivity of these resonators has been measured and compared to theoretical predictions taking into account strip height or groove depth
Keywords :
surface acoustic wave resonators; 200 MHz; 500 MHz; groove grating; metal strip structure; strip grating; surface transverse wave resonator; temperature sensitivity; Fabrication; Gratings; Insertion loss; Q factor; Reproducibility of results; Resonant frequency; Strips; Surface waves; Temperature sensors; Testing;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762132
