DocumentCode
3379898
Title
The effect of temperature on dielectric charging of capacitive MEMS
Author
Koutsoureli, M. ; Michalas, L. ; Papaioannou, G.
Author_Institution
Phys. Dept., Univ. of Athens, Athens, Greece
fYear
2011
fDate
10-14 April 2011
Abstract
The present paper investigates the effect of temperature on the charging process in dielectric films of MEMS capacitive switches. The investigation includes the assessment of MIM capacitors and MEMS capacitive switches. The data analysis shows that the dielectric charging is thermally activated and the process can be described by a system with a wide distribution of relaxation times that exhibits power-law relaxation. The activation energies obtained from MIM and MEMS are attributed to different charge collection mechanisms.
Keywords
MIM devices; capacitors; dielectric thin films; microswitches; MEMS capacitive switches; MIM capacitors; dielectric charging; dielectric films; power-law relaxation; Current measurement; Dielectric films; Dielectrics; Electric fields; Electrodes; Micromechanical devices; Temperature measurement; capacitive MEMS; dielectric charging; dielectrics;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium (IRPS), 2011 IEEE International
Conference_Location
Monterey, CA
ISSN
1541-7026
Print_ISBN
978-1-4244-9113-1
Electronic_ISBN
1541-7026
Type
conf
DOI
10.1109/IRPS.2011.5784490
Filename
5784490
Link To Document