Title :
Computational fluid dynamics modeling of flexural plate wave pumps
Author :
Nguyen, N.T. ; Doering, R.W. ; Lal, A. ; White, R.M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
This paper presents design issues and a numerical model of a micromachined pump based on acoustic streaming in water. Influences of channel height, wave amplitude, and backpressure on the velocity profile and flow rate are investigated. Using these results, design rules for the acoustic micropump are derived. Thermal transport effects of the acoustic streaming are also discussed in order to integrate a thermal flow sensor into the pump or to apply the pump for cooling purposes
Keywords :
acoustic streaming; computational fluid dynamics; micropumps; acoustic micropump; acoustic streaming; computational fluid dynamics; cooling device; design; flexural plate wave pump; micromachining; numerical model; thermal flow sensor; thermal transport; Acoustic devices; Acoustic sensors; Biomembranes; Computational fluid dynamics; Computational modeling; Cooling; Equations; Micropumps; Numerical models; Pumps;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762181
