Integrated array of SAW sensors for gas analysis

Author

Anisimkin, V.I. ; Fedosov, V.I. ; Krystal, R.G. ; Medved, A.V. ; Zemlyakov, V.E. ; Verona, E.

Author_Institution

Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia

Volume

1

fYear

1998

fDate

1998

Firstpage

529

Abstract

A new approach, based on the properties of SAW devices, is used to integrate an array of gas sensors into a single substrate, using a single chemical membrane. The different response of each individual device to the same set of gases is provided by different acoustic propagation conditions, only. Three four-sensor prototypes have been implemented on ST-cut quartz substrates, using different Pd films as membrane. Their response upon exposure to concentrations of H₂, N₂O and CO in N₂ and to water humidity have been tested. A strong dependence of the response versus the acoustic propagation direction has been demonstrated for all the prototypes analyzed

Keywords

Rayleigh waves; gas sensors; humidity sensors; surface acoustic wave delay lines; surface acoustic wave sensors; CO; H₂; H₂O; N₂O; Pd; Pd membrane films; Rayleigh waves; SAW delay lines; SAW sensors; ST-cut quartz substrates; SiO₂; acoustic propagation direction; catalytic layers; four-sensor prototypes; gas analysis; gas sensor array; humidity response; integrated array; single chemical membrane; single substrate; Acoustic propagation; Acoustic sensors; Biomembranes; Chemical sensors; Gas detectors; Gases; Prototypes; Sensor arrays; Surface acoustic wave devices; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE

Conference_Location

Sendai

ISSN

1051-0117

Print_ISBN

0-7803-4095-7

Type

conf

DOI

10.1109/ULTSYM.1998.762205

Filename

762205