Title :
Integrated array of SAW sensors for gas analysis
Author :
Anisimkin, V.I. ; Fedosov, V.I. ; Krystal, R.G. ; Medved, A.V. ; Zemlyakov, V.E. ; Verona, E.
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
Abstract :
A new approach, based on the properties of SAW devices, is used to integrate an array of gas sensors into a single substrate, using a single chemical membrane. The different response of each individual device to the same set of gases is provided by different acoustic propagation conditions, only. Three four-sensor prototypes have been implemented on ST-cut quartz substrates, using different Pd films as membrane. Their response upon exposure to concentrations of H2, N2O and CO in N2 and to water humidity have been tested. A strong dependence of the response versus the acoustic propagation direction has been demonstrated for all the prototypes analyzed
Keywords :
Rayleigh waves; gas sensors; humidity sensors; surface acoustic wave delay lines; surface acoustic wave sensors; CO; H2; H2O; N2O; Pd; Pd membrane films; Rayleigh waves; SAW delay lines; SAW sensors; ST-cut quartz substrates; SiO2; acoustic propagation direction; catalytic layers; four-sensor prototypes; gas analysis; gas sensor array; humidity response; integrated array; single chemical membrane; single substrate; Acoustic propagation; Acoustic sensors; Biomembranes; Chemical sensors; Gas detectors; Gases; Prototypes; Sensor arrays; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762205
