Title :
Piezoelectric servo-actuator of LiNbO3 with an integrated sensor
Author :
Yokoyama, H. ; Wakatsuki, N. ; Kudo, S.
Author_Institution :
Ishinomaki Senshu Univ., Japan
Abstract :
A LiNbO3 bimorph actuator can be fabricated on a single crystal plate with inverse polarized layers. The actuator shows no hysteresis and no creep. However, as a thin rectangular plate inevitably exhibits mechanical high Q resonance, in this paper, we propose and examine a new servo-actuator with an integrated displacement velocity sensor and a feedback circuit to suppress resonance. Using FEM, the driving electrode was designed to drive only the first resonant mode and to suppress the secondary mode. Therefore, we applied the negative feedback circuit for the servo-actuator to suppress the fundamental mode. Optical measurement of the displacement of the actuator confirmed no ringing response to step impulse driving voltage
Keywords :
circuit feedback; equivalent circuits; fibre optic sensors; finite element analysis; lithium compounds; piezoelectric actuators; servomechanisms; transient response; FEM; LiNbO3; bimorph actuator; displacement velocity sensor; driving electrode; equivalent circuit; first resonant mode; integrated sensor; inverse polarized layers; negative feedback circuit; optical fibre probe; piezoelectric servo-actuator; resonance suppression; secondary mode suppression; single crystal plate; step impulse driving voltage; transient response; Actuators; Creep; Electrodes; Feedback circuits; Hysteresis; Mechanical sensors; Negative feedback; Optical feedback; Piezoelectric polarization; Resonance;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762210
